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Instrument and Equipment

Scanning Electron Microscope(SEM)

2021-03-30

Tabletop SEM SH-5000M

1. Max. 100,000x Magnification

2. SE Detector (Option – BSE Detector)

3. 1kV to 30kV Variable Accelerating Voltage

4. Multi-Vacuum Mode – Standard / Charge Up Reduction

5. Image Observation Ready within 2 min.

6. 5-axis Strokes – X,Y,R, Z, T

7. 4-Hole Variable Aperture (30/50/100/200µm)

8. Options – EDS System, Cooling Stage, Low Vacuum Control



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